本研究假設一般粗糙表面，研究探針尖端曲率半徑對測量此表面的影響。從幾何以及頻譜等方面來看表面粗糙度的問題，分析探針測得出的表而的粗糙度與真實表面粗糙度的差別。結果發現，探針測量的精確度與atuo-correlation function有很密切的關係。
The object of this research is to investigate the effect of stylus tip on measuring rough surfaces from the viewpoint of geometric and spectral analyses and compare the roughness of measured surface and that of the original surface. It is found that the accuracy of measurement strongly depends on the auto-correlation function.
