本研究利用一鍋化多元醇法(one-pot polyol synthesis)結合有機金屬裂解法(Metal Organic Decomposition,MOD),直接於氧化鋁基板上製備三氧化鎢/還原型氧化石墨烯(WO3/RGO)奈米複合材料薄膜應用於二氧化氮氣體感測。用X射線繞射(XRD)、掃描式電子顯微鏡(SEM)以及原子力顯微鏡(AFM)來分析薄膜的結構和型態。顯微鏡觀察到,還原型氧化石墨烯均勻的分布在三氧化鎢的薄膜內。二氧化氮氣體測試結果顯示,三氧化鎢/還原型氧化石墨烯複合薄膜在室溫下的二氧化氮的感測靈敏度比純的三氧化鎢薄膜來的大,並且擁有良好的選擇性、極佳的重覆性、良好的反應時間與回覆時間、製作過程簡單及成本低等優點。
One-pot polyol process was combined with metal organic decomposition (MOD) method to fabricate a room-temperature NO2 gas sensor based on tungsten oxide and reduced graphene oxide (WO3/RGO) nanocomposite films. X-ray diffractometry (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to analyze the structure and morphology of the fabricated films. Comparative gas sensing results indicated that the sensor that was based on the WO3/RGO nanocomposite film had much more response than that based on pure WO3 film in detecting NO2 gas at room temperature. Microstructural observations revealed that RGO was embedded in the WO3 matrix. Therefore, a model of potential barriers to electronic conduction in the composite material was used to reveal that the high response was associated with the stretching of the two depletion layers at the surface of the WO3 film and at the interface between the WO3 film and the RGO when detected gases are adsorbed at room temperature. The sensor that was based on a nanocomposite film of WO3/RGO responded strongly to low concentrations of NO2 gas at room temperature and its use is practical because of it is easy to fabricate.