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請使用永久網址來引用或連結此文件:
https://irlib.pccu.edu.tw/handle/987654321/24082
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| 題名: | Bias voltage effect on the structure and property of the (Ti:Cu)-DLC films fabricated by cathodic arc plasma |
| 作者: | o, JY (Jao, Jui-Yun)
Han, S (Han, Sheng)
Yen, CC (Yen, Chung-Chih)
Liu, YC (Liu, Yu-Ching)
Chang, LS (Chang, Li-Shin)
Chang, CL (Chang, Chi-Lung)
Shih, HC (Shih, Han-C.) |
| 貢獻者: | Dept Mat Sci & Engn |
| 關鍵詞: | Transmission electron microscope
Diamond-like carbon
Cathodic arc evaporation |
| 日期: | 2011-02 |
| 上傳時間: | 2013-01-25 10:52:41 (UTC+8) |
| 摘要: | Titanium copper-diamond-like carbon (Ti:Cu)-DLC films were deposited onto silicon via cathodic arc evaporation process using titanium (Ti) and copper (Cu) target arc sources to provide Ti and Cu in the metal containing diamond-like carbon (Me-DLC) film systen. Acetylene reactive gases served as the carbon sources, which were activated at 180 degrees C at 20 mTorr. Varying substrate bias voltages from -80 to -250 V were used in order to provide the (Ti:Cu)-DLC structure. The structure, interface, and mechanical properties of the produced film were analyzed by transmission electron microscope (TEM), IR Fourier transform (FTIR) spectra, and Rockwell C hardness. The process parameters were compared by studying the various mechanical properties of the films, such as microhardness and adhesion. The results showed that the Ti-containing a-C:H/Cu coatings exhibited an amorphous layer of Ti-DLC layer as well as a nanocrystalline layer of Cu multilayer structure. The mechanical properties of the coatings, as determined by Rockwell C indents testing and the ball-on-disc test. varied with the the applied negative DC bias voltage. These (Ti:Cu)-DLC coatings are promising materials for soft substrate protective coatings. Crown Copyright (C) 2010 Published by Elsevier B.V. All rights reserved. |
| 關聯: | DIAMOND AND RELATED MATERIALS 卷: 20 期: 2 頁數: 123-129 |
| 顯示於類別: | [化學工程與材料工程學系暨碩士班] 期刊論文
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