We demonstrate the heating-assisted for ultrasonic nanoimprint lithography (U-NIL) to overcome the insufficient energy from ultrasonic vibrations for a little time occurring in U-NIL. The heating assistance benefits U-NIL and does not affect the process time because the hot plate dose not be heated and cooled during imprinting process. Using poly(ethylene terephthalate) (PET) film as imprinted polymer, we have compared imprinted results between heating-assisted U-NIL and U-NIL. Furthermore, the experimental results show that the temperature of hot plate and the imprinted force have a great effect on the imprinted pattern depth and uniformity. We conclude that the proposed heating-assisted U-NIL process has the potential to improve and advance U-NIL.
