Structure and characterization of the multilayered Ti-DLC films by FCVA

文化大學機構典藏 CCUR > 理工學院 > 工學院 > 化學工程與材料工程學系暨碩士班 > 期刊論文 > Item 987654321/20959

請使用永久網址來引用或連結此文件: https://irlib.pccu.edu.tw/handle/987654321/20959

題名:	Structure and characterization of the multilayered Ti-DLC films by FCVA
作者:	Lin, YH (Lin, Yu-Hung) Lin, HD (Lin, Hong-Da) Liu, CK (Liu, Chun-Kuo) Huang, MW (Huang, Meng-Wen) Chen, JR (Chen, Jiann-Ruey) Shih, HC (Shih, Han C.)
貢獻者:	化材所
關鍵詞:	Diamond-like carbon (DLC) Ti-DLC Filtered cathodic vacuum arc (FCVA)
日期:	2010-09
上傳時間:	2011-12-09 15:22:59 (UTC+8)
摘要:	This work presents a simple approach for the synthesis of multilayered titanium-diamond-like carbon (multilayered Ti-DLC) films on a Si substrate by a filtered cathodic vacuum arc (FCVA) system using Ti-coated graphite target to supply carbon as well as the dopant titanium. This study focuses on the characterization of microstructure, surface roughness, mechanical strength and electrical resistivity. The results indicated that the multilayered Ti-DLC films exhibit better mechanical properties than the Ti-free and Ti-implanted DLC films, and both multilayered Ti- and Ti-implanted DLC films have similar Ti atomic concentrations. The surface roughness of the multilayered Ti-DLC films shows a value much lower than the other films. The film microstructure consists in TiC nanocrystals precipitated in the amorphous carbon matrix with a multilayered structure. Because of the high hardness and low roughness, the multilayered Ti-DLC films can be used as biomedical, wear-resistant and solid lubricant coatings. (C) 2010 Published by Elsevier B.V.
顯示於類別:	[化學工程與材料工程學系暨碩士班] 期刊論文

文件中的檔案:

檔案	描述	大小	格式	瀏覽次數
index.html		0Kb	HTML	422	檢視/開啟

在CCUR中所有的資料項目都受到原著作權保護.

資料載入中.....